Wafer Fab Validation to SEMI E78, SEMI E129 and ANSI/ESD S20.20 Requirements
RMV has an established reputation in the validation process of Wafer Fab machine centers for customer acceptance as a 3rd party assessment organization. With expertise in advanced materials selection, troubleshooting robotics in a disk drive and wafer fab cleanroom environment, RMV has the fully integrated experience and know how to resolve issues in addition to providing clear cut recommendations for the mitigation of both electrostatic attraction (ESA) and electrostatic discharge (ESD) issues. RMV has conducts on site validation assessments for Semi E-78 compliance as well as providing advanced level training for multi-national companies for wafer fab compliance in the USA and abroad.
Organizations attending RMV training include National Semiconductor, Intel, KLA-Tencor and many others.
Our arsenal of advanced level ESD instrumentation in conducting assessments from the ground up include
— Grounding Integrity
— Charge contribution of person in combination with flooring and cleanroom garments
— Charge Contribution of materials
— Equipment Resistance Mapping for Wafer Far related fixturing and material
— Triboelectrification of the system in both static and dynamic states
— Charge decay
— Contact Voltage Measurements
— Faraday Cup Charge Measurements
— Ionizer effectiveness at the equipment center
— Ionization qualification services
— Develop PMI (preventive maintenance inspection) protocols
— Develop ESD Materials Validation Process Documents
— ESD Event Detection with Computer Interfaced Instrumentation
— Validation of FOUP Integrity
— Validation of Silicon Wafer
— Wafer Carrier and Solar Array Validation
— Contact Separation Voltage Contribution
— Document Development
— Comprehensive Hands on training
