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WAFER FABS -  SEMI E78 Validation 

Wafer Fab Validation to SEMI E78, SEMI E129 and ANSI ESD S20.20

RMV has an established reputation in the validation process of Wafer Fab machine centers for customer acceptance as a 3rd party assessment  organization.


With expertise in advanced materials selection, troubleshooting robotics in a disk drive and wafer fab cleanroom environment, RMV has the fully integrated experience and know how to resolve issues in addition to providing clear cut recommendations for the mitigation of both electrostatic attraction (ESA) and electrostatic discharge (ESD) issues.


RMV conducts on site validation assessments for Semi E-78 compliance as well as providing advanced level training for multi-national companies for wafer fab compliance in the USA and abroad.

Organizations attending RMV training include National Semiconductor, Intel, KLA-Tencor and others from the disk drive, semiconductor manufacturing and contract manufacturers.

Root Cause Analysis: ESD Events & Fields

Our extensive and fully calibrated inventory of  advanced level ESD instrumentation for the performance of assessments  may include: 

  • Grounding Integrity

  • Charge contribution of persons

  • Charge Contribution of materials

  • Equipment Resistance Mapping

  • Tribo-electrification of the system 

  • Charge decay

  • Contact Voltage

  • Faraday Cup Charge Measurements

  • Ionization 

  • Ionization qualification services

  • PMI (preventive maintenance  inspection) protocol

  • ESD Materials Validation Process Documents

  • ESD Event Detection with Computerized  Instrumentation

  • Validation of FOUP Integrity Validation 

  • Wafer Carrier and Solar Array Validation

  • Contact Separation  Contribution

  • Technical Document Development

  • Hands on training

  • Troubleshooting of  Automated Equipment  

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